TEOS

Tetraethyl Orthosilicate (9N)

Ethylsilicate (TEOS) is used as the raw materials used in semiconductor technology deposition can be used for low pressure chemical vapor deposition (LPCVD) the surface of silica in SiC wafers deposits, ensure the density of the oxide layer medium and SiC wafers adhesion ability, improve the performance of the device and yield, and avoided in order to obtain a certain thickness of oxide layer of the shortcomings of long time high temperature oxidation.

프로세스

TEOS is obtained by esterification of silicon tetrachloride and ethanol at normal temperature and pressure. TEOS tained by adsorption, distillation and filtration. Jinhong has reached strategic cooperation with major semiconductor companies, and can supply more than 1,200 tons of electronic-grade TEOS every year.

Product	TEOS
CAS No.	78-10-4
순도	≥99.9%
Capacity	Cylinder: 5 gallons、Cylinder: 10 gallons、Cylinder: 200L
Valve	1/4’VCR
Filling volume	17kg、34kg、190kg

애플리케이션

Semiconductors

TEOS can be used for low pressure chemical vapor deposition (LPCVD) the surface of silica in SiC wafers deposits.

자주 묻는 질문

What’s the specification can you supply?

Cylinder: 5 gallons Valve: 1/4’VCR Content: 17kg
Cylinder: 10 gallons Valve: 1/4’VCR Content: 34kg
Cylinder: 200L Valve: 1/4’VCR Content: 190kg

What is the storage condition of TEOS?

TEOS should be stored in a cool, dry and well-ventilated warehouse. Keep away from fire and heat sources. Storage temperature should not exceed 37°C. Keep container tightly closed. It should be stored separately from oxidants, acids, and alkalis, and should not be mixed. Explosion-proof lighting and ventilation facilities are adopted.

What are the uses of TEOS?

TEOS is often used to prepare heat-resistant and chemical-resistant coatings and organic silicon solvents. It can also be used in organic synthesis, basic raw materials for the preparation of advanced crystals, optical glass treatment agents, bonding agents, and insulating materials in the electronics industry.

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TEOS

Tetraethyl Orthosilicate (9N)

프로세스

애플리케이션

Semiconductors

자주 묻는 질문

What’s the specification can you supply?

What is the storage condition of TEOS?

What are the uses of TEOS?

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관련 제품

C₃H₆

H₂

CO₂

Ar

NH₃

NH₃

TEOS

SF₆

SiH₄

C₄F₈

C₂H₂

N₂

Tetraethyl Orthosilicate (9N)

프로세스

애플리케이션

Semiconductors

자주 묻는 질문

What’s the specification can you supply?

What is the storage condition of TEOS?

What are the uses of TEOS?

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관련 제품

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