트리메틸실릴아민

TSA has multiple application areas, including but not limited to:Coatings, rubber, and plastics: Used as an additive or modifier to enhance material properties.Chemical synthesis: Employed as a precursor for producing other organosilicon compounds, such as aminosilanes.Semiconductor industry: Utilized in chip fabrication processes as a precursor for silicon nitride (Si₃N₄) and silicon oxynitride (SiON) layers.Deposition processes: Applied as a reactive precursor in Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) for high-quality thin films.Production of Trimethylsilylamine (TSA)Trimethylsilylamine (TSA) is typically synthesized by reacting monochlorosilane with NH₃ under low-temperature conditions. It can also be obtained through alternative methods to achieve high-purity TSA, such as:Pyrolysis of polysilazane under oxygen-free or low-oxygen conditions at 300–600 °C.Amino transfer reaction between diisopropylaminosilane and ammonia under heating and pressure.At Jinhong Gas, TSA is produced by dissolving chlorosilane in toluene and gradually adding NH₃. The critical parameters lie in controlling the reaction temperature and the ammonia feed rate. Currently, Jinhong Gas achieves an annual production capacity of 10 tons of 3N-grade TSA.

Liquid Gas	트리메틸실릴아민
CAS No.	13862-16-3
순도	≥99.9%
Purity based on metal ions	≥99.9999 %