Silanes are compounds of silicon and hydrogen, including monosilane (SiH4), disilane (Si2H6), and some higher-order silicon-hydrogen compounds. Among them, monosilane is the most common, and monosilane is sometimes abbreviated as silane. Silane is a colorless, air-reactive and suffocating gas.
Gas | Silane |
CAS No. | 7803-62-5 |
Purity | ≥99.9% |
Capacity | S-cylinder: 47L、Y-cylinder: 440L-490L、ISO tank: 13.2m³ |
Valve | DISS632 |
Filling volume | 12Kg、120Kg、4000Kg |
Usage | Can be used to manufacture high-purity polycrystalline silicon, monocrystalline silicon, microcrystalline silicon, amorphous silicon, silicon nitride, silicon oxide, heterogeneous silicon, and various metal silicides. |
Emergency situation | Extremely flammable gas. Equipped with pressurized gas, it may explode when exposed to heat. |
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