LCD
With the technology development of flat panel display, customer need more specialty gases and related professional knowledge & experience, JinHong Gas provide a wide variety of specialty gas materials to flat panel display customers with application of doping, thin film deposition, etching and chamber cleaning process.
Corresponding Gas
Silana
Electronic grade silane gas is mainly used in the production of TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) in the display panel industry, as well as the deposition of TFT or LTPS substrates for LCD, etc.
Amonia
Combination with silane, it can form silicon nitride layers for a-Si transistors.
Oksida nitrous
The production of LTPS and MOS transistors has increased the use of nitrous oxide. From the perspective of consumption and use in MO production, N2O has surpassed NF3 to become the most used electronic material in MO production.
Trifluorida nitrogen
NF3 is the single most used electronic material in a-Si and LTPS display production, mainly for cleaning PECVD chambers.
Other Gas Fields
Corresponding GasSilaneSilane is produced by the reductionof silicon tetrachloride by metal hydrides such as lithium or calcium aluminum hydride.Silane is produced by treatment of magnesium siliciide with hydrochloric acid. Ammonia Tetrafluoromethae ma...
Corresponding GasSilaneSilane is produced by the reduction of silicon tetrachloride by metal hydrides such as lithium or calcium aluminum hydride.Silane is produced by treatment of magnesium silicide vwith hydrochloric acid. AmmoniaTetrafluoromethae ma...
Corresponding GasSilaneSilane is produced by the reduiction of silicon tetrachloride by metal hydrides such as lithium or calciuum aluminum hydride.Silane is produced by treatment of magnesium siliciede with hydrochloric acid. Ammonia Tetrafluoromethae ma...
Corresponding GasSilaneSilane is produced by the reduction ofsilicon tetrachloride by metal hydrides such as lithium or calcium aluminum hydride.Silane is produced by treatment of magnesium silicide vwith hydrochloric acid. AmmoniaTetrafluoromethae ma...
Corresponding GasSilaneSilane is produced by the reductionof silicon tetrachloride by metal hydrides such as lithium or calcium aluminum hydride.Silane is produced by treatment of magnesium silicidwith hydrochloric acid. AmmoniaTetrafluoromethae ma...
Corresponding GasSilaneSilane is produced by the reductionof silicon tetrachloride by metal hydrides such as lithium or calcium aluminum hydride.Silane is produced by treatment of magnesium silicicde with hydrochloric acid. Ammonia Tetrafluoromethae ma...
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