LCD
With the technology development of flat panel display, customer need more specialty gases and related professional knowledge & experience, JinHong Gas provide a wide variety of specialty gas materials to flat panel display customers with application of doping, thin film deposition, etching and chamber cleaning process.
Corresponding Gas
Silane
Electronic grade silane gas is mainly used in the production of TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) in the display panel industry, as well as the deposition of TFT or LTPS substrates for LCD, etc.
Ammonia
Combination with silane, it can form silicon nitride layers for a-Si transistors.
Nitrous Oxide
The production of LTPS and MOS transistors has increased the use of nitrous oxide. From the perspective of consumption and use in MO production, N2O has surpassed NF3 to become the most used electronic material in MO production.
Nitrogen Trifluoride
NF3 is the single most used electronic material in a-Si and LTPS display production, mainly for cleaning PECVD chambers.
