Silane is one of the basic materials of the silicon semi-conductor industry. It is used as a source of silicon for growing polycrystalline and epitaxial (monocrystalline) silicon, silicon dioxide, silicon nitride and doping of gallium arsenide. Silane is also used as a dopant in the production of compound semiconductor devices, for chemical vapour deposition of refractory metal silicides, and for deposition of amorphous silicon on photocopier drums.