Triethyl borate

Triethyl borate, depending on its purity, is widely used in semiconductor manufacturing, lithium-ion battery additives, flame-retardant materials, green synthetic chemistry, and specialty coatings.

Process

Through continuous technological upgrades, we are now able to reliably supply high-purity triethyl borate to meet the growing demand in the high-end electronic chemicals sector. As a multifunctional boron source and intermediate, the main application areas of triethyl borate include: Semiconductor industry: Used as a boron dopant source in chemical vapor deposition (CVD) processes to produce dielectric thin films such as borosilicate glass (BSG) and borophosphosilicate glass (BPSG). Lithium-ion batteries: As an electrolyte additive, it optimizes the cathode/electrolyte interface, suppresses electrolyte oxidation and decomposition, and improves cycle life and rate performance at high voltages. Organic synthesis: Serves as an important raw material for synthesizing organoboron compounds and as an ethoxylation reagent. Flame retardants: Can be used as a raw material for synthesizing flame-retardant polyols or directly as a flame-retardant additive in polymers such as polyurethane. Specialty coatings and additives: Used as a fluxing agent for soldering, a plasticizer, and a component in high-temperature resistant coatings. Jinhong Gas focuses on the purification of triethyl borate and employs atmospheric distillation to produce high-purity, electronic-grade triethyl borate. Currently, Jinhong Gas has an annual production capacity of 5 tons of high-purity triethyl borate.
Product Triethyl borate
CAS No. 150-46-9
Purity ≥99.99%
Chloride ions ≤50 ppb
Moisture ≤20000 ppb
Number of particles ≥ 0.2 μm ≤10 pc/ml
Number of particles ≥ 0.3 μm ≤7 pc/ml
Number of particles ≥ 0.5 μm ≤5 pc/ml
Number of particles ≥ 1.0 μm ≤1 pc/ml
Main component content/% ≥99.99%
Chroma ≤5APHA
Total metal ions < 5ppb

Applications

Semiconductors

In advanced semiconductor processes, triethyl borate serves as a boron doping source for chemical vapor deposition (CVD), reacting with precursors such as tetraethyl orthosilicate (TEOS) to form borosilicate glass (BSG) and borophosphosilicate glass (BPSG) dielectric layers. These dielectric layers exhibit excellent reflow characteristics, smoothing wafer surface topography and providing effective electrical isolation and interlayer insulation.

Lithium-Ion Batteries

As an electrolyte additive, triethyl borate can form a stable interfacial protective layer on high-voltage cathode materials, suppressing electrolyte decomposition under high voltage. This improves the cycle life and rate capability of lithium-ion batteries, especially those using high-voltage cathode materials.

Flame-Retardant Applications

It serves as a raw material for synthesizing flame-retardant polyols, which are further used to produce polyurethane foams with excellent flame-retardant performance. The boron element in its molecular structure promotes char formation during combustion, providing a flame-retardant effect.

Organic Synthesis and Chemicals

Triethyl borate is an important intermediate and raw material for synthesizing other organoboron compounds. It can also be used as an ethoxylation reagent, a high-purity boron source, a flux for welding, and a component in high-temperature, oxidation-resistant coatings.

Analytical Identification

Its vapor produces a distinct green flame upon combustion, a feature commonly used for preliminary identification of boron-containing compounds.

Frequently Asked Question

What product specifications can you provide?

Cylinder: 5 gallons Valve: 1/4’VCR Filling: 16 Kg Cylinder: 10 gallons Valve: 1/4’VCR Filling: 32 Kg Cylinder: 200 L Valve: 1/4’VCR Filling: 172 Kg

How is triethyl borate produced?

Triethyl borate is typically synthesized by esterification of phosphorus oxychloride (POCl₃) with ethanol under basic conditions. The crude product then undergoes multiple purification steps to achieve electronic-grade purity.

What is the role of triethyl borate in the semiconductor industry?

In semiconductor manufacturing, high-purity triethyl borate serves as a boron doping source. Through chemical vapor deposition (CVD) and related techniques, it is incorporated into dielectric thin films such as borosilicate glass (BSG) and borophosphosilicate glass (BPSG). These films play key roles in interlayer insulation, surface planarization, and passivation within chips.

What is the role of triethyl borate in lithium-ion batteries?

In lithium-ion batteries, triethyl borate acts as an effective electrolyte additive. It forms a stable interfacial layer on cathode materials, suppressing oxidative decomposition of the electrolyte under high-voltage conditions. This significantly enhances the cycle stability and rate performance of the battery, especially in high-voltage systems.

What special chemical properties does triethyl borate have?

A notable property of triethyl borate is its hygroscopic nature; it hydrolyzes upon contact with water, decomposing into ethanol and boric acid. Therefore, strict sealing and dry conditions are required during storage and transportation. Additionally, its vapor produces a distinctive green flame upon combustion, which can be used for identification of boron-containing compounds.

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