Triethyl phosphate

Depending on its purity, triethyl phosphate (TEP) is widely used in semiconductors, polyurethane flame retardants, green solvents, heat-resistant coatings, and other fields.

Jinhong Gas has continuously upgraded its production technology, significantly improving both the purity and output of triethyl phosphate, becoming a leading supplier in the semiconductor industry.

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Process

As a multifunctional solvent and additive, triethyl phosphate finds broad applications in the following areas: High-efficiency solvent: Used in the production of coatings, adhesives, inks, and polymer materials, effectively regulating evaporation rate and leveling properties. Flame-retardant additive for lithium-ion battery electrolytes: Significantly enhances the safety of power batteries and energy storage systems. Chemical intermediate: Used in the synthesis of pesticides, pharmaceuticals, and other fine chemicals. Plasticizer and flame retardant: Applied in polymer materials (such as PVC and engineering plastics) and resins. Electronics industry: High-purity electronic-grade TEP is a key component in photoresists for semiconductor and LCD manufacturing. Jinhong Gas focuses on the purification process of triethyl phosphate (TEP). By using vacuum distillation, followed by a two-step light and heavy component removal process, electronic-grade TEP with a main component purity exceeding 4N (99.99%) can be obtained. Currently, Jinhong Gas has an annual production capacity of 5 tons for high-purity triethyl phosphate.
Product Triethyl phosphate
CAS No. 78-40-0
Purity ≥99.99%
Boron(B) ≤ 0.5 ppb
Chloride ions ≤ 50 ppb
Water content ≤20000 ppb
Number of particles ≥ 0.2 μm ≤10 pc/ml
Number of particles ≥0.3 μm ≤7 pc/ml
Number of particles ≥0.5 μm ≤5 pc/ml
Number of particles ≥1.0 μm ≤1 pc/ml
Main component content/% ≥99.99%
Chroma ≤5APHA
Total metal ions < 5ppb

Applications

Semiconductors

In advanced semiconductor processes, triethyl phosphate (TEP) reacts with tetraethyl orthosilicate (TEOS) and triethyl borate (TEB) via PECVD to form phosphate glass (PSG) and borophosphosilicate glass (BPSG). These dielectric materials not only provide electrical isolation but also help planarize underlying layers and fill isolation structures, playing a crucial role in semiconductor fabrication.

High-Boiling Solvent

Used as a solvent for nitrocellulose and cellulose acetate, a solvent for organic peroxide catalysts, a dispersant solvent for fluorinated ethylene, and as a curing agent or diluent for polyester resins and epoxy resins.

Stabilizer

Acts as a stabilizer for chlorinated insecticides, phenolic resins, and organic peroxides. In furfuryl alcohol resins, it serves as a curing agent and prevents discoloration during polymerization of maleic acid and ethylene glycol.

Catalyst

Used as a catalyst in xylene isomerization, olefin polymerization, styrene–conjugated diene polymerization, trialkylboron–olefin exchange reactions, production of tetraethyllead, dicarbodiimide, and high-temperature dehydration of acetic acid to produce ketene.

Flame Retardant

Used as a flame retardant for polyester resins.

Plasticizer

Serves as a plasticizer for cellulose acetate, unsaturated polyesters, and vinyl acetate polymers, and as a modifier and plasticizer for polyester resins. Additionally, it is used as an ethylation reagent, a vinyl chloride softener, a softening agent for phenolic resins used in mold cores, and as a paint remover.

Frequently Asked Question

What product specifications can you provide?

Cylinder: 5 gallons Valve: 1/4” VCR Filling: 20 kg Cylinder: 10 gallons Valve: 1/4” VCR Filling: 40 kg Cylinder: 200 L Valve: 1/4” VCR Filling: 180 kg

How is triethyl phosphate (TEP) produced?

Triethyl phosphate is typically synthesized via esterification of phosphorus oxychloride (POCl₃) with ethanol under basic conditions. The crude product then undergoes multiple purification steps to achieve electronic-grade purity.

What is the environmental impact of triethyl phosphate?

TEP is biodegradable. However, if released in large quantities into water, its phosphorus content may contribute to eutrophication. As a chemical, it should still be handled and disposed of according to relevant safety and environmental regulations.

What is the role of triethyl phosphate in the semiconductor industry?

In advanced semiconductor processes, TEP reacts with tetraethyl orthosilicate (TEOS) and triethyl borate (TEB) via PECVD to form phosphate glass (PSG) and borophosphosilicate glass (BPSG). It is a key electronic chemical for integrated circuit manufacturing.

What is the role of triethyl phosphate in lithium-ion batteries?

In lithium-ion battery electrolytes, TEP is commonly used as a flame-retardant additive. It improves the thermal stability and safety of the electrolyte without significantly affecting electrochemical performance, effectively reducing the risk of battery fire.

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