The application of electronic-grade carbon dioxide in the semiconductor industry
According to media reports, the Suwon District Court in South Korea recently sentenced a former researcher at SEMES to four years in prison for illegally obtaining patent technology related to the company’s semiconductor cleaning equipment and using this technology to manufacture similar tools for export to China. In the semiconductor industry, high-purity (electronic-grade) carbon dioxide is mainly used for cleaning technology and immersion lithography. With the increasing number of cleaning procedures in Fab factories, the demand for high-purity (electronic-grade) carbon dioxide in China will also increase in the future. Chip cleaning used to be simply immersing the chip in a cleaning solution. However, from FinFET to GAA structure, advanced DRAM and 3D-NAND,