Diborane in Hydrogen

The mixture gas of diborane and hydrogen is mainly used as dopant for gaseous impurity source, ion implantation and boron doping oxidation diffusion.

Process

Blending
Chemical NameDiboraneHydrogen
CAS No.19287-45-71333-74-0
UN No.1954
Label elementsSignal word: Danger

Description

Physical and chemical properties
Physical state: Gas
Appearance: Colorless.
Odor Slight: sweet.
Odor threshold: 2.5 ppm (Diborane)
Autoignition temperature: 36 °C / 97 °F (Diborane)

Hazard Statements

Harmful if inhaled
May cause damage to lung, kidney and central nervous system
Extremely flammable gas
Catches fire spontaneously if exposed to air
Contains gas under pressure; may explode if heated
May form explosive mixtures with air
Symptoms may be delayed

Prevention

Keep away from heat,sparks,open flames,hot surfaces.
No smoking
Do not eat, drink or smoke when using this product
Wash hands thoroughly after handling
Use and store only outdoors or in a well ventilated place
Use a back flow preventive device in piping
Use equipment purged with inert gas or evacuated prior to discharge from cylinder
Use only with equipment of compatible materials of construction and rated for cylinder pressure
Do not open valve until connected to equipment prepared for use
Close valve after each use and when empty
When returning cylinder, install leak tight valve outlet cap or plug

Handing and storage

Store locked up
Protect from sunlight when ambient temperature exceeds 52°C/125°F
Store in cool, dry, well-ventilated area of non-combustible construction away from heavily trafficked areas and emergency exits. Keep at temperatures below 52°C / 125°F.
Cylinders should be stored upright with valve protection cap in place and firmly secured to prevent falling.
Full and empty cylinders should be segregrated.
Use a “first in-first out” inventory system to prevent full cylinders from being stored for excessive periods of time.
Stored containers should be periodically checked for general condition and leakage.
Outside or detached storage is preferred.

Frequently Asked Question

Q: What’s the specification can you supply?

Gas: H2/B2H6 Cylinder: 44L Valve: DISS632

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