Fluorine Krypton in Neon

The Mixture gas of neon, krypton and fluorine is used in 8 “, 12 “semiconductor factory chip manufacturing.

Process

Blending
Chemical NameFluorineKryptonNeon
CAS No.7782-41-47439-90-97440-01-9
UN No.1956
Label elements Signal word: Warning

Description

Physical and chemical properties
Physical state: Compressed gas
Appearance: Colorless.
Odor: Odorless to pungent.
Odor threshold: 0.02 – 0.126 ppm (Fluorine)

 

Hazard Statements

Contains gas under pressure; may explode if heated
Harmful if inhaled
Causes serious eye irritation
Causes skin irritation

Prevention

Avoid breathing gas
Use and store only outdoors or in a well ventilated place
Wash hands thoroughly after handling
Wear protective gloves, protective clothing, eye protection, and/or face protection
Use a backflow preventive device in piping
Use only with equipment rated for cylinder pressure
Close valve after each use and when empty

Handing and storage

Store in cool, dry, well-ventilated area of non-combustible construction away from heavily trafficked areas and emergency exits.
Keep at temperatures below 52°C / 125°F.
Cylinders should be stored upright with valve protection cap in place and firmly secured to prevent falling.
Full and empty cylinders should be segregrated.
Use a “first in-first out” inventory system to prevent full cylinders from being stored for excessive periods of time.
Stored containers should be periodically checked for general condition and leakage.

Frequently Asked Question

Q: What’s the specification can you supply?

Gas:F2/Kr/Ne Cylinder:47L Valve:CGA679

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