CH₃F

Fluoromethane

Fluoromethane (CH₃F), also known as HFC-41, methyl fluoride, or fluoromethane, is an organic compound with the chemical formula CH₃F. It is a colorless gas with a pungent odor, and is soluble in ether and ethanol.

Fluoromethane has an ozone depletion potential (ODP) of 0, a global warming potential (GWP) of 116, and an atmospheric lifetime of 2.8 years. It is characterized by good chemical stability, flammability, non-toxicity, and non-corrosiveness.

As a specialty gas, CH₃F is widely used in plastic materials, metal processing, pharmaceuticals, chemicals, electronics, and semiconductor industries.

Leveraging advanced technology, Jinhong Gas has mastered the large-scale production of CH₃F, ensuring a sustainable supply of high-quality products to the global market.

Process

Electronic-grade CH3F, owing to its excellent properties, is widely used in the following fields: Semiconductor Etching Processes: Electronic-grade fluoromethane is an efficient etching gas, commonly applied in reactive ion etching (RIE) during semiconductor chip manufacturing. Gas Blending Applications: In practical production, fluoromethane is often mixed with gases such as oxygen, nitrogen, helium, argon, nitrogen trifluoride (NF3), and carbon dioxide to meet diverse process requirements. Flat Panel Display and Photovoltaics: In the manufacturing of flat panel displays (e.g., TFT-LCD, OLED) and photovoltaic cells, fluoromethane is also used in thin-film etching and cleaning processes, enabling fine device processing and performance optimization. Eco-friendly Refrigerant: As fluoromethane contains no chlorine atoms and causes no damage to the ozone layer, it is regarded as a potential environmentally friendly refrigerant alternative. Jinhong Gas can produce 5N-grade high-purity CH3F products through purification technology.

GAS	Monofluoromethane
CAS No.	593-59-3
Purity	≥99.999%
O₂+Ar	≤2.0 ppm
N₂	<4.0 ppm
CO₂	≤2.0 ppm
Other organic compounds (CHF3, C2H6, C2H4)	≤5.0 ppm
Water	<2.0 ppm
Acidity (in HF)	≤0.1 ppm
Total impurity content	≤10.0 ppm

Applications

Semiconductors

High-purity CH3F is a green and efficient next-generation etching gas, applicable to the etching of semiconductors and electronic products, such as the selective etching of silicon compound thin films. In semiconductor and electronic manufacturing, HFC-41 dissolves fluorine ions under radio-frequency fields, enabling selective etching of silicon compound films through reactive ion etching (RIE).

Refrigeration

Due to the ozone-depleting effects of chlorofluorocarbons (CFCs) and hydrochlorofluorocarbons (HCFCs), CH3F—free of chlorine atoms and non-damaging to the ozone layer—is regarded as a potential environmentally friendly refrigerant alternative.

Chemistry

CH3F serves as a key fluorine-containing intermediate in organic synthesis. It can be introduced into more complex molecular structures and is used in the synthesis of various fluorinated compounds.

Frequently Asked Question

What product specifications can you provide?

Cylinder: 47L Valve: DISS724 Filling Capacity: 16Kg

How is Methyl Fluoride (CH₃F) produced?

There are two main synthesis methods for CH₃F: Gas-phase fluorination: Using chloromethane (CH₃Cl) and hydrogen fluoride (HF) as raw materials, a fluorination reaction occurs under the action of a catalyst. Gas-phase hydrogenolysis dechlorination: Using chlorofluoromethane (CH₂ClF) or dichlorofluoromethane (CHCl₂F) as raw materials, they react with hydrogen under the action of a catalyst to produce crude CH₃F. After a series of chemical purification and physical distillation processes, high-purity electronic grade CH₃F is obtained.

Is Methyl Fluoride a greenhouse gas?

Yes. CH₃F is considered a moderate greenhouse gas. It has an ozone depletion potential (ODP) of 0, a global warming potential (GWP) of 116, and an atmospheric lifetime of about 2.8 years.

What is the environmental impact of Methyl Fluoride?

If leakage occurs during production, use, or discharge, CH₃F may accumulate in the local environment. Due to its flammability, it poses a risk of fire or explosion. In the event of a large-scale leak, decomposition may generate by-products such as hydrogen fluoride, which can cause short-term contamination of soil, water, and ecosystems.

Inquiry

TiCl₄

Titanium tetrachloride

SiH₂Cl₂，DCS

Dichlorosilane

C₄F₆

Hexafluorobutadiene

NF₃

Nitrogen Trifluoride (5N)

Nitrogen trifluoride is prepared by the direct fluorination of ammonia. It may also be obtained…

Cl₂

Chlorine (5N)

Chlorine is produced commercially by the electrolysis of salt solutions (either sodium, potassium…

CH₄

Methane (5N)

Methane is the principal constituent of natural gas (typically natural gas is 87% methane)…

PSA Nitrogen Generator

PSA nitrogen generator is a nitrogen generation device based on Pressure Swing Adsorption

Gases

Equipment

On-Site Gas Supply

Catalogue

CH₃F

Fluoromethane

Process

Applications

Semiconductors

Refrigeration

Chemistry

Frequently Asked Question

What product specifications can you provide?

How is Methyl Fluoride (CH₃F) produced?

Is Methyl Fluoride a greenhouse gas?

What is the environmental impact of Methyl Fluoride?

Inquiry

Related Products

TiCl₄

SiH₂Cl₂，DCS

C₄F₆

NF₃

Cl₂

CH₄

CO

HCL

SO₂

Cl₂

NO

Fluoromethane

Process

Applications

Semiconductors

Refrigeration

Chemistry

Frequently Asked Question

What product specifications can you provide?

How is Methyl Fluoride (CH₃F) produced?

Is Methyl Fluoride a greenhouse gas?

What is the environmental impact of Methyl Fluoride?

Inquiry

Related Products

Leaving A Message

Talk to Our Gas Experts....