Hexafluoroethane is a colorless, inflammable gas that is insoluble in water but soluble in ethanol. Its boiling point is -78.2°C, the melting point is -100.6°C, and its critical temperature is 19.7°C. Hexafluoroethane is generally used for plasma etching gas in the microelectronics industry, as well as device surface cleaning, optical fiber production, and low temperature refrigeration.