Nitrogen Trifluoride (5N)

The chemical formula of nitrogen trifluoride is NF₃. It is a colorless, odorless and stable gas at normal temperature. It is a strong oxidant. High purity nitrogen trifluoride has excellent etch rate and selectivity, and it is also a very good cleaning agent. Jinhong can provide you with high-purity nitrogen trifluoride gas to improve your semiconductor process.

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Process

Nitrogen trifluoride is prepared by the direct fluorination of ammonia. It may also be obtained by electrolysis of molten ammonium bifluoride or by direct combination of the elements nitrogen and fluorine using an electrical discharge at low temperatures.
   
Gas Nitrogen trifluoride
CAS No. 7783-54-2
Purity 99.99%
Capacity Cylinder: 44L、Cylinder: 440L、ISO-20ft、ISO-40ft
Valve CGA640
Filling volume 20kg、200kg、4000kg、8000kg
Usage Used as high-energy fuel.
Emergency situation May cause or exacerbate combustion, oxidize, contain pressurized gas, and may explode when exposed to heat.
Hazard statement Can cause or exacerbate combustion; Oxidizer, filled with pressurized gas; May explode when exposed to heat, harmful if inhaled, and may cause damage to organs if exposed for a long time or repeatedly.

Applications

Silicon Processing

Nitrogen trifluoride is used as a high speed, selective etchant in silicon processing. It has been used to etch silicon, polysilicon, silicon nitride and silicon oxide as well as refractory metals and silicides.

Industrial

Nitrogen trifluoride is sometimes used as the fluorine source in HF /DF chemical lasers. Nitrogen trifluoride is used as a fluorinating agent. Nitrogen trifluoride is also used for fibre treatment. F

Frequently Asked Question

Q: What’s the specification can you supply?

Cylinder: 44L Valve: CGA640 Content: 20kg
Cylinder: 440L Valve: CGA640 Content: 200kg
ISO-20ft Valve: CGA640 Content: 4000kg
ISO-40ft Valve: CGA640 Content: 8000kg

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