Octafluorocyclobutane

Octafluorocyclobutane has stable chemical properties, non-toxic and harmless, low global warming potential (GWP) value and zero ozone depletion index (ODP) value. It is a green and environmentally friendly special gas. Due to these good properties, octafluorocyclobutane has been widely used in technical fields such as high-voltage insulation, cleaning and etching, and plasma treatment in recent years.

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Process

Octafluorocyclobutane can be produced by the dimerization of tetrafluoroethylene through pyrolysis, quenching, filtration, compression, etc; Octafluorocyclobutane can also be obtained by electrolysis of tetrafluorocyclobutane in anhydrous hydrogen fluoride. Contacting crude octafluorocyclobutane containing impurities with an impurity decomposing agent at a high temperature and then contacting an adsorbent can substantially remove impurities such as fluorocarbons and obtain high-purity octafluorocyclobutane.
GasOctafluorocyclobutane
CAS No.115-25-3
Purity≥99.9%

Applications

Semiconductors

In Bosch dry etching processes, C4F8 acts as a passivation gas to protect the sidewalls of deep silicon trenches, significantly improving the anisotropy of silicon etching. It can also be used as an etching gas, suitable for etching silicon dioxide, silicon nitride, and other low-k dielectric materials. C4F8 is typically mixed with gases such as argon (Ar), oxygen (O₂), or nitrogen (N₂) to fine-tune the etching process.

Gas Insulation

Octafluorocyclobutane has a low GWP value (8900, only 37% of SF6), and the decomposition products under the action of arcs are fluorocarbons, which are non-toxic or low-toxic substances, and have a certain insulating arc extinguishing ability.

Chemical

According to the chemical properties of octafluorocyclobutane, it can also be used as the main raw material for other chemical products.

Refrigeration

In high-end applications where potential corrosion must be avoided, C4F8 can be used as a refrigerant.

Electrical Applications

C4F8 has a global warming potential one-third that of SF6, and its insulating strength in uniform electric fields is 1.11–1.80 times that of SF6. Therefore, C4F8 can be used as an insulating medium in high-voltage electrical equipment, replacing SF6 in some applications.

Fire Protection

In applications requiring water-free fire suppression, C4F8 can serve as a fire-extinguishing agent, particularly in fire suppression systems for precision electronic instruments.

Frequently Asked Question

What product specifications do you provide?

Cylinder: 44L Valve: DISS 712 Filling weight: 50 kg

How is octafluorocyclobutane (C4F8) produced?

C4F8 is typically produced via chemical synthesis. The most common method involves reacting cyclobutane with fluorine in the presence of an appropriate catalyst to generate crude products, which are then refined through a series of physical purification processes to obtain high-purity electronic-grade C4F8.

Is octafluorocyclobutane a greenhouse gas?

Yes. C4F8 is a greenhouse gas with a global warming potential (GWP) of 3,400–9,700 (CO₂ equivalent) and an atmospheric lifetime of approximately 32 years.

What are the environmental impacts of C4F8?

C4F8 has an ozone depletion potential (ODP) of 0, so it does not harm the ozone layer. It is highly resistant to biodegradation, which may lead to long-term environmental accumulation. However, its bioaccumulation potential is low, and its impact on ecosystems is relatively limited.

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