Application of Ultrapure Ammonia in Electronic Semiconductors
Ultra-pure ammonia gas is a highly pure gas, typically used in the electronic technology applications of the semiconductor manufacturing industry. Ultra-pure ammonia gas has a purity of over 99.999% and is prepared through specialized manufacturing processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD). This highly pure gas is essential for electronic technology applications in the semiconductor industry. Ultra-pure ammonia gas is widely used in the electronic semiconductor technology field and is one of the important chemical gases in the semiconductor industry. It is mainly used in the manufacturing of silicon wafers, which is a critical step in the photolithography process. In the photolithography process, ultra-pure ammonia gas can