
The Application of Silane in Semiconductor CMOS Technology
Silane refers to a group of chemical compounds consisting of silicon and hydrogen atoms (SiH4). It is a colorless and flammable gas, characterized by its distinctive pungent odor. Silane is highly reactive due to the presence of the silicon-hydrogen bonds, making it an essential building block for a wide range of chemical processes. Silane(silane gas or liquid silane) plays a crucial role in CMOS (Complementary Metal-Oxide-Semiconductor) technology, encompassing various key steps such as surface treatment, thin film deposition, and cleaning. In this article, we will explore the detailed application of silane in CMOS technology, focusing on its role in improving transistor performance and reliability. Let’s delve into the versatile applications of silane in